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Proceedings Paper

Monte Carlo simulation and experimental investigation of x-ray spectra from very thin metal layers on diamond substrates
Author(s): Bernd David; Rainer Eckart; Gerhard Martens; Rainer Pietig; Axel Thran
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Paper Abstract

We used the Monte Carlo code EGSnrc to simulate electron energy loss profiles as well as angle resolved x-ray spectra for metal-layer/substrate combinations in the primary electron energy range of 60-160 keV. We were furthermore able to separate the bremsstrahlung fraction originating in the substrate from that of the metal layer. The simulations were accompanied by experimental investigations. High-energetic electrons of 60-160 keV were directed onto 1-2 μm thin tungsten layers on top of 500 μm diamond substrates. The spectra were recorded by an energy resolved detector positioned in backward direction. We compared the experimental data with the simulation results and found good agreement. An enhanced monochromaticity in backward direction however, as expected from thin film theory, has not been observed due to the influence of the substrate.

Paper Details

Date Published: 10 September 2005
PDF: 12 pages
Proc. SPIE 5918, Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II, 59180T (10 September 2005); doi: 10.1117/12.616313
Show Author Affiliations
Bernd David, Philips Research Labs. (Germany)
Rainer Eckart, Philips Research Labs. (Germany)
Gerhard Martens, Philips Research Labs. (Germany)
Rainer Pietig, Philips Research Labs. (Germany)
Axel Thran, Philips Research Labs. (Germany)


Published in SPIE Proceedings Vol. 5918:
Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II
George A. Kyrala; Jean-Claude J. Gauthier; Carolyn A. MacDonald; Ali M. Khounsary, Editor(s)

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