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Proceedings Paper

Linearity improvement of lateral effect position sensitive devices
Author(s): Song Cui; Ying Zhang; Yeng Chai Soh; Changyun Wen
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Paper Abstract

In this paper, a linearity index is proposed to assess the performance of the position measurement of using position sensitive devices (PSDs). Using the index, a set of position measurement formulae is proposed for PSD with tetra-lateral structures. Compared to the conventional results, the proposed measurement formulae have improved the area with distortion less than 1% from the currently best result of 13% to 25%. Simulation results are reported to verify the theoretical analysis.

Paper Details

Date Published: 7 September 2005
PDF: 10 pages
Proc. SPIE 5881, Infrared and Photoelectronic Imagers and Detector Devices, 588107 (7 September 2005); doi: 10.1117/12.615893
Show Author Affiliations
Song Cui, Singapore Institute of Manufacturing Technology (Singapore)
Ying Zhang, Singapore Institute of Manufacturing Technology (Singapore)
Yeng Chai Soh, Nanyang Technological Univ. (Singapore)
Changyun Wen, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 5881:
Infrared and Photoelectronic Imagers and Detector Devices
Randolph E. Longshore, Editor(s)

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