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Proceedings Paper

Development of large aperture DOE for beam smoothing
Author(s): Yong-Ping Li; Wei Zhang; Xiaobo Zhang; Fangjie Shu
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Paper Abstract

A design of multi-step diffractive optical element (MDOE) is developed for the high power laser output smoothing. A hybrid algorithm is presented which inserts a quasi-optimum process in every iterative loop. This method of MDOE design saves the computing time tremendously. The top profile error (TPE) is about 8.4%, which looks inferior to what we have gotten in the earlier years with using continues profile design, but very easy in manufacture to match the design data. Now this MDOE with 16 steps on the surface of K9 glass can be realized with four masks' etching facility. The maximum etching error of the depth is 10-80nm, which is receivable with tolerance analyze in our design. The MDOE has 70mm diameter, and uniform illumination area is an Φ600μm spot. With using expanding 1.064 μm beam, the smoothing pattern in focus plane is measured. The result shows that the TPE is about 19%. It is believable that with the influence by the interaction of second hot electron and time domain smoothing this result is acceptable.

Paper Details

Date Published: 30 August 2005
PDF: 7 pages
Proc. SPIE 5876, Laser Beam Shaping VI, 58760O (30 August 2005); doi: 10.1117/12.615605
Show Author Affiliations
Yong-Ping Li, University of Science and Technology of China (China)
Wei Zhang, University of Science and Technology of China (China)
Xiaobo Zhang, University of Science and Technology of China (China)
Fangjie Shu, University of Science and Technology of China (China)

Published in SPIE Proceedings Vol. 5876:
Laser Beam Shaping VI
Fred M. Dickey; David L. Shealy, Editor(s)

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