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Proceedings Paper

Three-dimensional superresolution of focus-region of high numerical aperture objective lens: applied for multi-photon-absorption irradiation
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Paper Abstract

Different types of objective lens (OL), i.e. circular, annular and one-dark-ring, are proposed and demonstrated to control the aspect ratio (AR) of micro-focus-region of high numerical aperture (NA) OL. Namely, the AR decreases from about 7.3 to 2.7 in case of using a circular OL with NA changes from 0.7 to 1.4, respectively. By using an annular OL, the transverse size of the focal spot of micro-focus-region decreases but its longitudinal size increases, so that the AR increases several times with respect to the case of circular OL. In particular, when using the one-dark-ring OL, one can decrease both transverse and longitudinal sizes of the focal spot or decrease only the longitudinal size, so that the AR obtained with a one-dark-ring OL is decreased to about 70% of that obtained with a circular OL. Such lenses can be useful for many applications such as sub-microfabrication and three-dimensional data storage using multi-photon absorption process.

Paper Details

Date Published: 27 August 2005
PDF: 8 pages
Proc. SPIE 5931, Nanoengineering: Fabrication, Properties, Optics, and Devices II, 593118 (27 August 2005); doi: 10.1117/12.614799
Show Author Affiliations
Ngoc Diep Lai, National Chung Cheng Univ. (Taiwan)
Jian Hung Lin, National Chung Cheng Univ. (Taiwan)
Po Wen Chen, National Chung Cheng Univ. (Taiwan)
Jaw Luen Tang, National Chung Cheng Univ. (Taiwan)
Chia Chen Hsu, National Chung Cheng Univ. (Taiwan)

Published in SPIE Proceedings Vol. 5931:
Nanoengineering: Fabrication, Properties, Optics, and Devices II
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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