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Proceedings Paper

Selective growth of conjugated polymer thin film with nanoscale controlling by chemical vapor depositions toward 'Nanonics'
Author(s): Yoshiyuki Suzuki; Hayato Kazama; Nobuhiro Terasawa; Yoshimi Naito; Tetsuzo Yoshimura; Yukihiko Arai; Kunihiko Asama
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Paper Abstract

We present a novel polymer-chain-controlling and selective growth technique to make high-index-contrast (HIC) waveguides and photonic crystals. In the present work, poly-azomethine (poly-AM) films that are conjugated polymer were grown on substrates with surface treatment by chemical vapor deposition (CVD) using p-phenylenediamine (PPDA) and terephthalaldehyde (TPA) as reactive source monomers. For polymer chain controlling, poly-AM films were grown by CVD on SiO film, which was obliquely evaporated on a substrate tilted along the y-axis. The chains on the SiO film were found to be aligned along the y-axis. For selective growth, on a glass substrate surface, where a hydrophobic treatment was applied using hexamethyl-disilazane (HMDS), a hydrophilic SiO thin film was deposited through a metal mask by the vacuum evaporation to form a hydrophilic/hydrophobic pattern. The poly-AM thin film was found to be selectively grown on the SiO region, that is, on the hydrophilic region, without growth on the hydrophobic region. These results demonstrate a potentiality of the proposed technique to provide a wide range of three-dimensional fine structures.

Paper Details

Date Published: 18 August 2005
PDF: 8 pages
Proc. SPIE 5931, Nanoengineering: Fabrication, Properties, Optics, and Devices II, 59310G (18 August 2005); doi: 10.1117/12.614795
Show Author Affiliations
Yoshiyuki Suzuki, Tokyo Univ. of Technology (Japan)
Hayato Kazama, Tokyo Univ. of Technology (Japan)
Nobuhiro Terasawa, Tokyo Univ. of Technology (Japan)
Yoshimi Naito, Tokyo Univ. of Technology (Japan)
Tetsuzo Yoshimura, Tokyo Univ. of Technology (Japan)
Yukihiko Arai, Tokyo Univ. of Technology (Japan)
Kunihiko Asama, Tokyo Univ. of Technology (Japan)

Published in SPIE Proceedings Vol. 5931:
Nanoengineering: Fabrication, Properties, Optics, and Devices II
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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