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Proceedings Paper

Effects of ion assist and substrate temperature on the optical properties and microstructure of MgF2 films produced by e-beam evaporation
Author(s): Cheng-Chung Jaing; Ming-Hua Shiao; Cheng-Chung Lee; Chih-Jung Lu; Ming-Chung Liu; Chin-Han Lee; His-Chao Chen
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Paper Abstract

Magnesium fluoride thin films were prepared by electron-beam evaporation and ion-assisted deposition. The effects of ion assist and substrate temperature during the deposition on the optical properties and microstructure have been studied. The grain size, the crystallinity and the surface roughness of MgF2 films prepared without IAD all decreased with the decrease of substrate temperature. The MgF2 films deposited with IAD had small grain size, rough surfaces, fluorine deficiency and large optical loss over the 200-500nm wavelength region due to argon-ion bombardment.

Paper Details

Date Published: 19 August 2005
PDF: 6 pages
Proc. SPIE 5870, Advances in Thin-Film Coatings for Optical Applications II, 58700F (19 August 2005); doi: 10.1117/12.614753
Show Author Affiliations
Cheng-Chung Jaing, Ming Hsin Univ. of Science & Technology (Taiwan)
Ming-Hua Shiao, National Applied Research Labs. (Taiwan)
Cheng-Chung Lee, National Central Univ. (Taiwan)
Chih-Jung Lu, National Chung Hsing Univ. (Taiwan)
Ming-Chung Liu, National Central Univ. (Taiwan)
Chin-Han Lee, National Central Univ. (Taiwan)
His-Chao Chen, National Central Univ. (Taiwan)


Published in SPIE Proceedings Vol. 5870:
Advances in Thin-Film Coatings for Optical Applications II
Michael L. Fulton; Jennifer D. T. Kruschwitz, Editor(s)

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