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Proceedings Paper

Traceable multiple sensor system for absolute form measurement
Author(s): Michael Schulz; Joachim Gerhardt; Ralf D. Geckeler; Clemens Elster
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Paper Abstract

The requirements for form or topography measurement become ever-challenging. Desired lateral resolutions are sometimes smaller than one millimeter, whereas the size of the specimen can exceed one meter. To meet these requirements, scanning measurement systems are increasingly applied with sensors being (much) smaller than the specimen. However, due to the presence of quadratic sensor and scanning stage errors, large errors of the reconstructed topographies can emerge. To overcome these problems, a novel scanning measurement system is proposed. The system includes a linear scanning stage, a compact interferometer used for multiple distance measurements and an autocollimator for additional angular measurements. The effect of quadratic sensor and first-order scanning stage errors which the system allows to eliminate is discussed. Topography reconstruction is outlined and first measurements with a demonstrator set-up are described which show that the proposed novel measurement principle works well under real measurement conditions.

Paper Details

Date Published: 30 August 2005
PDF: 8 pages
Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 58780A (30 August 2005); doi: 10.1117/12.614726
Show Author Affiliations
Michael Schulz, Physikalisch-Technische Bundesanstalt Braunschweig (Germany)
Joachim Gerhardt, Physikalisch-Technische Bundesanstalt Berlin (Germany)
Ralf D. Geckeler, Physikalisch-Technische Bundesanstalt Braunschweig (Germany)
Clemens Elster, Physikalisch-Technische Bundesanstalt Berlin (Germany)

Published in SPIE Proceedings Vol. 5878:
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II
Angela Duparre; Bhanwar Singh; Zu-Han Gu, Editor(s)

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