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Proceedings Paper

Characterizing lateral resolution of interferometers: the Height Transfer Function (HTF)
Author(s): B. Doerband; J. Hetzler
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Paper Abstract

The lateral resolution of an interferometer is limited mainly by the design of the optical arrangement as well as the size of the beam stop. For its characterization the MTF1,2 is not very useful. The height of a structure normal to the surface under test is transferred into a phase of a reflected wavefront. Since imaging mechanisms for intensity and phase are very different, we propose a Height Transfer Function (HTF) to describe the lateral resolution of interferometers. The HTF shows the quotient of the reconstructed and the original height of a sine-modulated surface structure as a function of the spatial frequency. The HTF can be measured with a test sample of varying periodical surface profiles and spacings. Simulations can be made using a combination of geometrical ray tracing and Fourier transformation techniques. Two different layouts of null systems for the test of an asphere are compared. A device to measure the HTF is shown along with results for a variety of different interferometers.

Paper Details

Date Published: 30 August 2005
PDF: 12 pages
Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 587806 (30 August 2005); doi: 10.1117/12.614311
Show Author Affiliations
B. Doerband, Carl Zeiss SMT AG (Germany)
J. Hetzler, Carl Zeiss SMT AG (Germany)

Published in SPIE Proceedings Vol. 5878:
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II
Angela Duparre; Bhanwar Singh; Zu-Han Gu, Editor(s)

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