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Proceedings Paper

Polarization of diffraction by reflection grating
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Paper Abstract

Diffraction angles, diffraction efficiency and polarization of diffraction by a reflection grating were measured by a null ellipsometer at a wavelength of 632.8 nm. The grating is too rough to be measured by a stylus profiler or an interferometric profiler. The measured diffraction angles follow the grating equation very well and can be used to predict the period of a grating. The efficiency for different diffraction orders can be used to predict the surface profile using appropriate models. For a reflection grating with 150 grooves/mm, the measured ψ ranges from 16 to 84o and ▵ from 96 to 361o. This wide range of polarization is rarely seen for other kinds of samples. Depolarization is small when the efficiency is high and efficiency is small when the depolarization is large.

Paper Details

Date Published: 30 August 2005
PDF: 7 pages
Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 58780N (30 August 2005); doi: 10.1117/12.613936
Show Author Affiliations
Soe-Mie F. Nee, Naval Air Warfare Ctr. (United States)
Tsu-Wei Nee, Naval Air Warfare Ctr. (United States)


Published in SPIE Proceedings Vol. 5878:
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II
Angela Duparre; Bhanwar Singh; Zu-Han Gu, Editor(s)

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