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Proceedings Paper

Phase-shifting laser diode interferometry with equal phase steps using a Fabry-Perot cavity
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Paper Abstract

A phase-shifting interferometer (PSI) with equal phase steps, using a frequency-tunable diode laser and a Fabry-Perot cavity, is proposed for the Carre algorithm. The measurement accuracy of the Carre algorithm depends on the equality of the phase steps. Using the Fabry-Perot cavity as a highly stable optical frequency reference, a high degree of phase step equality can be realized in the PSI with an optical frequency shift. Our experimental scheme realizes an optical frequency step equality higher than 2.1×10-5 and a measurement repeatability of λ/850.

Paper Details

Date Published: 18 August 2005
PDF: 8 pages
Proc. SPIE 5879, Recent Developments in Traceable Dimensional Measurements III, 58790Y (18 August 2005); doi: 10.1117/12.613881
Show Author Affiliations
Youichi Bitou, National Metrology Institute of Japan (Japan)
Hajime Inaba, National Metrology Institute of Japan (Japan)
Feng-Lei Hong, National Metrology Institute of Japan (Japan)
Toshiyuki Takatsuji, National Metrology Institute of Japan (Japan)
Atsushi Onae, National Metrology Institute of Japan (Japan)


Published in SPIE Proceedings Vol. 5879:
Recent Developments in Traceable Dimensional Measurements III
Jennifer E. Decker; Gwo-Sheng Peng, Editor(s)

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