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Proceedings Paper

Rough surface characterization and comparison of scatter measurements and models
Author(s): John C. Stover
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Paper Abstract

A study has been underway to provide a better scattering model for front surface reflectors with surface height variations that violate the smooth surface limit required for using the Rayleigh-Rice vector perturbation expression. This paper discusses the issues associated with surface characterization and sample measurement. These include the conversion of 1-D profile measurements to the 1-D PSD, the high frequency correction for the PSD and conversion to the 2-D PSD for use in a scattering model. A single comparison to a new rough surface scattering model is presented. The details of the model are not given in this paper.

Paper Details

Date Published: 18 August 2005
PDF: 8 pages
Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 58780U (18 August 2005); doi: 10.1117/12.613780
Show Author Affiliations
John C. Stover, The Scatter Works, Inc. (United States)


Published in SPIE Proceedings Vol. 5878:
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II
Angela Duparre; Bhanwar Singh; Zu-Han Gu, Editor(s)

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