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Proceedings Paper

Light scatter metrology of diamond turned optics
Author(s): John C. Stover
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Paper Abstract

Light scatter, a bothersome source of noise in optical system, can also be used as a sensitive indicator of surface features. Diamond turned optics typically have three types of surface features. In addition to the background near isotropic (two dimensional) roughness found on most polished front surface mirrors, there are two sources of one dimensional roughness. One of these is the expected periodic tool mark structure that can create a diffraction pattern. The other is random one dimensional roughness (parallel to the tool marks) that is caused by chip drag and jitter between tool and sample. This paper discusses experimental methods for separating the effects of these three distinct sources of roughness and gives examples of measurements on several samples. Several sources of confusion associated with rms roughness specifications (which are often substituted for scatter specifications) are also discussed.

Paper Details

Date Published: 31 August 2005
PDF: 7 pages
Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 58780R (31 August 2005); doi: 10.1117/12.613779
Show Author Affiliations
John C. Stover, The Scatter Works, Inc. (United States)

Published in SPIE Proceedings Vol. 5878:
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II
Angela Duparre; Bhanwar Singh; Zu-Han Gu, Editor(s)

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