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Proceedings Paper

Optimisation of low-coherence speckle interferometry (LCSI) for characterisation of multi-layered materials
Author(s): Kay Gastinger; Svein Winther
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Paper Abstract

In this paper the optical parameters of Low Coherence Speckle Interferometry (LCSI) are analysed in order to optimise the technique and increase the probing depth. The contrast of the interference signal depends on the configuration of the optical setup and the optical properties of the material. Theoretical investigations and measurements for optimising the beam ratio, the coherence function and imaging parameters are presented. By optimising the interference signal the probing depth of the technique can be extended. This is demonstrated for a semi-transparent polymer material. Finally, measurements of the deformation of interfaces in a multi-layered material are presented.

Paper Details

Date Published: 26 August 2005
PDF: 12 pages
Proc. SPIE 5858, Nano- and Micro-Metrology, 58580K (26 August 2005); doi: 10.1117/12.613170
Show Author Affiliations
Kay Gastinger, SINTEF ICT (Norway)
Svein Winther, SINTEF ICT (Norway)

Published in SPIE Proceedings Vol. 5858:
Nano- and Micro-Metrology
Heidi Ottevaere; Peter DeWolf; Diederik S. Wiersma, Editor(s)

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