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Proceedings Paper

International standards for metrology of microlens arrays
Author(s): Takaaki Miyashita
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Paper Abstract

The standardization of a microlens brings the merit for both users and suppliers, but which has issues to be solved in the characterization and evaluation due to the small lens size, caused from difficulty to apply the definition of conventional optical systems. Japan has the leading position of the international standardization activities in ISO for characterization of microlens since the early stage. Additionally, the recent development activities of wavefront aberration testing technologies are described.

Paper Details

Date Published: 27 August 2005
PDF: 14 pages
Proc. SPIE 5858, Nano- and Micro-Metrology, 585802 (27 August 2005); doi: 10.1117/12.612827
Show Author Affiliations
Takaaki Miyashita, Ricoh Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 5858:
Nano- and Micro-Metrology
Heidi Ottevaere; Peter DeWolf; Diederik S. Wiersma, Editor(s)

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