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Proceedings Paper

Microlenses metrology with digital holographic microscopy
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Paper Abstract

Digital holographic Microscopy (DHM) is an imaging modality reconstructing the wavefront in a numerical form, directly from a single digitalized hologram. It brings quantitative data derived simultaneously from the amplitude and phase of the complex reconstructed wavefront diffracted by the object and it is used to determine the refractive index and/or shape of the object with accuracy in the nanometer range along the optical axis. DHM comprises a microscope objective to adapt the sampling capacity of the camera to the information content of the hologram. This paper illustrates some of the possibilities offered by DHM for micro-optics quality control. Actual results obtained by DHM, yielding an axial precision up to 3.7 nm, will be compared with measurements performed with interferometers by SUSS MicroOptics SA and with the profiles measured with a mechanical scanning probe instrument (Alpha step 200 from Tencor Instrument). Two different micro-lenses arrays where tested: a quartz refractive lenses array (observed with transmission DHM) and a Silicon refractive lens array (observed with reflection DHM).

Paper Details

Date Published: 13 June 2005
PDF: 7 pages
Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); doi: 10.1117/12.612600
Show Author Affiliations
Florian Charriere, Ecole Polytechnique Federale de Lausanne (Switzerland)
Jonas Kuhn, Ecole Polytechnique Federale de Lausanne (Switzerland)
Tristan Colomb, Ecole Polytechnique Federale de Lausanne (Switzerland)
Frederic Montfort, Ecole Polytechnique Federale de Lausanne (Switzerland)
Etienne Cuche, Lyncee Tec SA (Switzerland)
Yves Emery, Lyncee Tec SA (Switzerland)
Kenneth Weible, SUSS MicroOptics SA (Switzerland)
Christian D. Depeursinge, Lyncee Tec SA (Switzerland)


Published in SPIE Proceedings Vol. 5856:
Optical Measurement Systems for Industrial Inspection IV
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)

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