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Proceedings Paper

Comparison of methods for the determination of the aperture correction of interference microscopes
Author(s): Rolf Kruger-Sehm
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Paper Abstract

For precision traceable measurements with interference microscopes it is necessary to know the aperture correction factor. The source of the correction is the finite diameter of the illumination light source. If there is no further knowledge about it, the usual way is the calibration of the instrument with a reference standard. In this contribution a practical way is described to determine the aperture correction factor of an interference microscope by direct measuring the diameter of the illumination aperture. A diffraction pattern of a line scale is directed into the microscope objective. In the back focal plane the set of diffraction orders acts a scale with known dimension. The scale of the diffraction orders can be observed through the eye piece tube together with the image of the aperture. Under the assumption of an accepted model the correction factor can be determined. Some considerations for the practical use and results are presented.

Paper Details

Date Published: 27 August 2005
PDF: 7 pages
Proc. SPIE 5858, Nano- and Micro-Metrology, 585810 (27 August 2005); doi: 10.1117/12.612594
Show Author Affiliations
Rolf Kruger-Sehm, Physikalisch-Technische-Bundesanstalt (Germany)


Published in SPIE Proceedings Vol. 5858:
Nano- and Micro-Metrology
Heidi Ottevaere; Peter DeWolf; Diederik S. Wiersma, Editor(s)

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