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Proceedings Paper

Micro-optics metrology using advanced interferometry
Author(s): Stephan Reichelt; Alexander Bieber; Bernd Aatz; Hans Zappe
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Paper Abstract

Interferometric testing of micro-optical components involves some challenges due to problems such as Fresnel diffraction artefacts, the non-common path interferometer configuration, coherent noise as well disturbing interferences, and uncertainties in distance measurements. Recently we have developed a versatile Mach-Zehnder / Twyman-Green hybride interferometer for micro-optics testing. The system combines the advantages of both interferometer types and allows full characterization of lens and surface figure errors as well as radius of curvature and focal length measurements. The interferometer system is explained and measurement results of micro-lenses are presented. Furthermore, this paper is concerned with the metrology challenges of interferometric testing on microscopic scales.

Paper Details

Date Published: 13 June 2005
PDF: 10 pages
Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); doi: 10.1117/12.612584
Show Author Affiliations
Stephan Reichelt, IMTEK, Univ. of Freiburg (Germany)
Alexander Bieber, IMTEK, Univ. of Freiburg (Germany)
Bernd Aatz, IMTEK, Univ. of Freiburg (Germany)
Hans Zappe, IMTEK, Univ. of Freiburg (Germany)


Published in SPIE Proceedings Vol. 5856:
Optical Measurement Systems for Industrial Inspection IV
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)

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