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Proceedings Paper

Investigation of thermal expansion homogeneity by optical interferometry
Author(s): R. Schodel
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Paper Abstract

Different measurement methods exist for the extraction of the coefficient of thermal expansion (CTE). Among them the observation of the sample length as a function of its temperature is the direct way. In the last decade, the use of phase shifting interferometry in combination with computer-based analysis of interference phase maps drastically improved interferometrical length measurements. In addition to the observation of the length itself, such measurements allow the extraction of a length topography L(x,y) of the sample as shown in this paper. From the behaviour of the length topography at different temperatures an upper limit of CTE-homogeneity can be obtained. It is shown in which way disturbing influences can be removed so that uncertainties of L(x,y) in the sub-nm range can be reached for different shaped samples

Paper Details

Date Published: 26 August 2005
PDF: 8 pages
Proc. SPIE 5858, Nano- and Micro-Metrology, 58580Q (26 August 2005); doi: 10.1117/12.612582
Show Author Affiliations
R. Schodel, Physikalisch-Technische Bundesanstalt (Germany)


Published in SPIE Proceedings Vol. 5858:
Nano- and Micro-Metrology
Heidi Ottevaere; Peter DeWolf; Diederik S. Wiersma, Editor(s)

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