Share Email Print

Proceedings Paper

Time synchronization of oscillating objects with laser pulse in pulse interferometry
Format Member Price Non-Member Price
PDF $17.00 $21.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Significant progress in MEMS/MOEMS development requires new measurement methods. The pulse interferometry is one of the widely used technique for oscillating object analyses. It is based on object observation during the short laser pulse illumination. In the paper a new method for electronic time synchronization of oscillating objects, laser pulses and camera registration is proposed. The system is developed to measure the silicon micromembrane surface shape. Laser pulse mode properties and camera adaptation to a microinterferometer setup are considered in the paper. A complementary system oriented on the investigation of the relationship between object transient shape changes and oscillation phases is shown. Preliminary results of measurement of silicon membrane shape changes during oscillations are presented.

Paper Details

Date Published: 13 June 2005
PDF: 6 pages
Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); doi: 10.1117/12.612581
Show Author Affiliations
Jaroslaw Bartold, Institute of Micromechanics and Photonics (Poland)
Jacek Kacperski, Institute of Micromechanics and Photonics (Poland)
Leszek Salbut, Institute of Micromechanics and Photonics (Poland)

Published in SPIE Proceedings Vol. 5856:
Optical Measurement Systems for Industrial Inspection IV
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)

© SPIE. Terms of Use
Back to Top