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Proceedings Paper

Airy-like internal reflection series applied in scatterometry and simulations of gratings
Author(s): Roman Antos; Jan Mistrik; Tomuo Yamaguchi; Masahiro Horie; Stefan Visnovsky
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Paper Abstract

The rigorous coupled wave analysis (RCWA) implemented as the Airy-like internal reflection series (AIRS) is applied in a theoretical analysis of the optical response of diffraction gratings. Detailed theoretical description of the RCWA with respect to the AIRS implementation is provided, including the application of Li's Fourier factorization rules and the recursive algorithm for sliced relief gratings. Numerical analysis of convergence properties including computation time is demonstrated for structures made of transparent, semiconductor, or metallic materials.

Paper Details

Date Published: 26 August 2005
PDF: 11 pages
Proc. SPIE 5858, Nano- and Micro-Metrology, 58580Y (26 August 2005); doi: 10.1117/12.612496
Show Author Affiliations
Roman Antos, Shizuoka Univ. (Japan)
Jan Mistrik, Shizuoka Univ. (Japan)
Tomuo Yamaguchi, Shizuoka Univ. (Japan)
Masahiro Horie, Dainippon Screen Mfg. Co., Ltd. (Japan)
Stefan Visnovsky, Charles Univ. (Czech Republic)


Published in SPIE Proceedings Vol. 5858:
Nano- and Micro-Metrology
Heidi Ottevaere; Peter DeWolf; Diederik S. Wiersma, Editor(s)

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