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Proceedings Paper

Confocal micro-optical distance sensor: realization and results
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Paper Abstract

In this paper, the realization and characterization of a microoptical sensor using the chromatic confocal principle is presented. The sensor head is designed for distance gauging applications in high aspect ratio cavities with a diameter of about 2 mm. The first part of this paper focuses on the design and fabrication process of the hybrid optical benches, which combines refractive and diffractive micro optical components. Very tight tolerances of the optical path are required for the functionality of the sensor. Therefore the alignment structures and mounts between the different optical elements are produced from PMMA using deep X-ray lithography, the first step of the LIGA process. In the second part of this paper the characterization of first prototypes using different light sources are described and results presented.

Paper Details

Date Published: 13 June 2005
PDF: 7 pages
Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); doi: 10.1117/12.612418
Show Author Affiliations
Peter Lucke, Forschungszentrum Karlsruhe (Germany)
Arndt Last, Forschungszentrum Karlsruhe (Germany)
Jurgen Mohr, Forschungszentrum Karlsruhe (Germany)
Aiko K. Ruprecht, Institute fur Technische Optik, Univ. Stuttgart (Germany)
Christof Pruss, Institute fur Technische Optik, Univ. Stuttgart (Germany)
Hans J. Tiziani, Institute fur Technische Optik, Univ. Stuttgart (Germany)
Wolfgang Osten, Institute fur Technische Optik, Univ. Stuttgart (Germany)
Peter Lehmann, Mahr GmbH (Germany)
Sven Schonfelder, Boehringer Ingelheim microParts GmbH (Germany)


Published in SPIE Proceedings Vol. 5856:
Optical Measurement Systems for Industrial Inspection IV
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)

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