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Proceedings Paper

Optimum instrumentation of a tapping mode, non-optically regulated near-field scanning optical microscope and its applications
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Paper Abstract

We describe the optimum design of the near-field scanning optical microscope (NSOM) based on a short probe tapping mode tuning-fork (TMTF) configuration and its applications in optoelectronic characterization and optical measurements. The short probe TMTF-NSOM is constructed to operate both in collection and excitation modes, in which a cleaved short fiber probe attached to one tine of the tuning fork is used as the light collector/emitter as well as the force sensing element. Interference fringes due to standing evanescent waves generated by total internal reflection are imaged by collection mode. On the other hand, excitation mode of short probe TMTF-NSOM is applied to perform near-field surface photovoltage measurements on AlGaInP light emitting diode structures.

Paper Details

Date Published: 27 August 2005
PDF: 7 pages
Proc. SPIE 5858, Nano- and Micro-Metrology, 58580W (27 August 2005); doi: 10.1117/12.612255
Show Author Affiliations
Nien Hua Lu, De Lin Institute of Technology (Taiwan)
National Taiwan Univ. (Taiwan)
Yu Min Chang, De Lin Institute of Technology (Taiwan)
Din Ping Tsai, National Taiwan Univ. (Taiwan)


Published in SPIE Proceedings Vol. 5858:
Nano- and Micro-Metrology
Heidi Ottevaere; Peter DeWolf; Diederik S. Wiersma, Editor(s)

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