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Proceedings Paper

Liquid mirror as planarity standard: a simplified experimental approach
Author(s): M. Vannoni; G. Molesini
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Paper Abstract

A simplified version of the liquid mirror setup to serve as planarity reference standard is described in detail. Particulars of the mounting, maintenance and use of the mirror are provided. A series of measurements over a diameter of 90 mm is reported; the resulting expanded uncertainty for the peak-to-valley achieved in experiments is 7 nm (2σ).

Paper Details

Date Published: 13 June 2005
PDF: 8 pages
Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); doi: 10.1117/12.612245
Show Author Affiliations
M. Vannoni, Istituto Nazionale di Ottica Applicata (Italy)
G. Molesini, Istituto Nazionale di Ottica Applicata (Italy)


Published in SPIE Proceedings Vol. 5856:
Optical Measurement Systems for Industrial Inspection IV
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)

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