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Proceedings Paper

Absolute distance measurement using femtosecond laser
Author(s): Seung-Woo Kim; Ki-Nam Joo; Jonghan Jin; Yun Seok Kim
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Paper Abstract

Possibilities of using recently-developed femtosecond pulse lasers for advanced precision length metrology are investigated. Special emphasis is placed on the use of femtosecond lasers particularly for absolute distance measurements with sub-micrometer accuracy over extensive ranges. This investigation reveals that femtosecond lasers are capable of providing a suitable means of nanometrology by implementing dispersive comb interferometry in combination with synthetic wavelength interferometry and heterodyne interferometry.

Paper Details

Date Published: 26 August 2005
PDF: 8 pages
Proc. SPIE 5858, Nano- and Micro-Metrology, 58580N (26 August 2005); doi: 10.1117/12.612238
Show Author Affiliations
Seung-Woo Kim, Korea Advanced Institute of Science and Technology (South Korea)
Ki-Nam Joo, Korea Advanced Institute of Science and Technology (South Korea)
Jonghan Jin, Korea Advanced Institute of Science and Technology (South Korea)
Yun Seok Kim, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 5858:
Nano- and Micro-Metrology
Heidi Ottevaere; Peter DeWolf; Diederik S. Wiersma, Editor(s)

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