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Proceedings Paper

Possible application of hyperchromatic optical systems for metrology of surfaces
Author(s): Jiri Novak; Antonin Miks
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Paper Abstract

The problems of topography of surfaces are very important in various parts of science and engineering. Several approaches exist for surface figure and roughness measurement. The measurement methods can be divided into two distinct categories, contact and non-contact techniques. Our work describes a relatively simple method for topography measurements that uses special optical systems (hyperchromats) with a linear dependence of longitudinal chromatic aberration on the wavelength of light. The aim of this work is to show a possible application of hyperchromatic optical systems for topography of surfaces. The work describes a basic analysis of parameters of hyperchromats, i.e. optical systems with large longitudinal chromatic aberration that is in our case linearly dependent on the wavelength of light. On the basis of the performed analysis, it can be designed such optical systems (optical sensors) that permit to perform measurements of topography of surfaces, i.e. determine a figure or roughness of surfaces. The sensor uses polychromatic light and relatively simple experimental arrangement. The proposed measurement technique seems to be quite simple and cost effective with respect to other measurement methods.

Paper Details

Date Published: 13 June 2005
PDF: 9 pages
Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); doi: 10.1117/12.612023
Show Author Affiliations
Jiri Novak, Czech Technical Univ. (Czech Republic)
Antonin Miks, Czech Technical Univ. (Czech Republic)

Published in SPIE Proceedings Vol. 5856:
Optical Measurement Systems for Industrial Inspection IV
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)

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