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Proceedings Paper

The laser-scanning confocal vibrometer microscope
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Paper Abstract

Sub-micrometer lateral resolution for the optical vibration measurement can be achieved when the scanned laser beam of a confocal microscope is the measurement beam of a heterodyne laser-Doppler vibrometer. Such a scanning system that allows vibration measurements up to 30 MHz is presented in this paper for the first time. We measured a minimum 1/e2 -power spot diameter of 745 nm and, therefore, the vibration analysis of sub-micrometer mechanical structures is possible with our system. We demonstrate measurements on comb-drive fingers with 2 μm diameter, the tiniest structures available for us.

Paper Details

Date Published: 13 June 2005
PDF: 12 pages
Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); doi: 10.1117/12.611996
Show Author Affiliations
Christian Rembe, Polytec GmbH (Germany)
Alexander Drabenstedt, Polytec GmbH (Germany)


Published in SPIE Proceedings Vol. 5856:
Optical Measurement Systems for Industrial Inspection IV
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)

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