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Proceedings Paper

Nanometer differential capacitive displacement sensor application on LAMOST telescope active optics experiment
Author(s): Yongjun Qi; Hongmin Li; Dehua Yang; Zhenchao Zhang
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Proc. SPIE 5931, Nanoengineering: Fabrication, Properties, Optics, and Devices II, 59311L; doi: 10.1117/12.611990
Show Author Affiliations
Yongjun Qi, Nanjing Institute of Astronomical Optics and Technology (China)
National Astronomical Observatories (China)
Chinese Academy of Sciences (China)
Hongmin Li, Nanjing Institute of Astronomical Optics and Technology (China)
Dehua Yang, Nanjing Institute of Astronomical Optics and Technology (China)
Zhenchao Zhang, Nanjing Institute of Astronomical Optics and Technology (China)


Published in SPIE Proceedings Vol. 5931:
Nanoengineering: Fabrication, Properties, Optics, and Devices II
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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