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Proceedings Paper

500-mm-aperture wavelength-tuning phase-shifting interferometer
Author(s): Liqun Chai; Qiao Xu; Yingjie Yu; Yang Deng; Jiancheng Xu
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Paper Abstract

A 500-mm-aperture wavelength-tuning phase-shifting interferometer has been developed in FOERC applied to the measurement of large optics. Also it can switches to a smaller 130-mm-aperture. We describes in detail the optical and mechanical design as well as calibration technique of phase shifter and phase-shifting algorithm design. A Zygo 4 inch standard reflective flat is used to evaluate the accuracy and repeatability of our wavelength-tuning phase-shifting system.

Paper Details

Date Published: 13 June 2005
PDF: 8 pages
Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); doi: 10.1117/12.611796
Show Author Affiliations
Liqun Chai, Fine Optical Engineering Research Ctr. (China)
Qiao Xu, Fine Optical Engineering Research Ctr. (China)
Yingjie Yu, Shanghai Univ. (China)
Yang Deng, Fine Optical Engineering Research Ctr. (China)
Jiancheng Xu, Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 5856:
Optical Measurement Systems for Industrial Inspection IV
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)

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