Share Email Print
cover

Proceedings Paper

Absolute calibration of step height by a novel interferometric microscope
Author(s): Takuma Doi; Tomizo Kurosawa
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

As a numerical aperture of objective in interferometric microscope increases, the interference fringe spacing, in order word, the basic scale of the measurement becomes greater than half a wavelength of light source due to the obliquity effect of converging illumination. The effect is the most serious uncertainty source when the step height of the standard specimen is calibrated by the interferometric microscope. Therefore, we have developed a novel phase-shifting interferometric microscope whose interference fringe spacing is absolutely calibrated. The scheme and the instrument that realize the absolute fringe spacing calibration and 3D profile measurement by the phase-shifting interferometry (PSI) at the same time, are described. The PSI measurement is carried out under the condition in which two interference fringes are made in the field ofview. The phase calculation error by the PSI is also estimated under the condition. If the sample with 100 nm step height is measured, the typical expanded uncertainty is 0.6 nm.

Paper Details

Date Published: 14 February 2005
PDF: 9 pages
Proc. SPIE 5776, Eighth International Symposium on Laser Metrology, (14 February 2005); doi: 10.1117/12.611641
Show Author Affiliations
Takuma Doi, National Metrology Institute of Japan (Japan)
National Institute of Advanced Industrial Science and Technology (Japan)
Tomizo Kurosawa, National Metrology Institute of Japan (Japan)
National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 5776:
Eighth International Symposium on Laser Metrology
R. Rodriguez-Vera; F. Mendoza-Santoyo, Editor(s)

© SPIE. Terms of Use
Back to Top