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Proceedings Paper

Calculation and measurement of the Mueller matrix for an elliptical mirror
Author(s): Oscar G. Rodriguez-Herrera; Neil Charles Bruce; Martha Rosete-Aguilar
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Paper Abstract

We have recently developed a scatterometer for bi-dimensional rough surfaces which uses an elliptical mirror to direct the light toward the rough surface and to collect the scattered light and direct it to a CCD camera. This device has advantages over similar previous devices such as the time needed for measurement and operation range. We have calculated and measured the Mueller matrix of the elliptical mirror and we have compared them to test the validity of our method. Preliminary results show differences between theory and experiment that must be explained.

Paper Details

Date Published: 14 February 2005
PDF: 9 pages
Proc. SPIE 5776, Eighth International Symposium on Laser Metrology, (14 February 2005); doi: 10.1117/12.611628
Show Author Affiliations
Oscar G. Rodriguez-Herrera, CCDAT, Univ. Nacional Autonoma de Mexico (Mexico)
Neil Charles Bruce, CCDAT, Univ. Nacional Autonoma de Mexico (Mexico)
Martha Rosete-Aguilar, CCDAT, Univ. Nacional Autonoma de Mexico (Mexico)

Published in SPIE Proceedings Vol. 5776:
Eighth International Symposium on Laser Metrology
R. Rodriguez-Vera; F. Mendoza-Santoyo, Editor(s)

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