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Proceedings Paper

Recent developments in spectral interference microscopes
Author(s): Mitsuo Takeda; Dalip Singh Mehta; Michal Emanuel Pawlowski; Takashi Kurokawa
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Paper Abstract

We will review recent developments in spectral interference microscopes for surface profilometry and tomography of discontinuous micro objects. To give specific examples, we will introduce some of the new devices and systems that have been developed in this group, among which are a tandem frequency-tunable liquid-crystal Fabry-Perot device with high spectral resolution and a wide tunable range, and a spectral interference microscope with a digital-holography-based numerical refocusing function to extend effective depth of focus.

Paper Details

Date Published: 14 February 2005
PDF: 7 pages
Proc. SPIE 5776, Eighth International Symposium on Laser Metrology, (14 February 2005); doi: 10.1117/12.611596
Show Author Affiliations
Mitsuo Takeda, Univ. of Electro-Communications (Japan)
Dalip Singh Mehta, Indian Institute of Technology/Delhi (India)
Michal Emanuel Pawlowski, Univ. of Electro-Communications (Japan)
Takashi Kurokawa, Tokyo Univ. of Agriculture and Technology (Japan)


Published in SPIE Proceedings Vol. 5776:
Eighth International Symposium on Laser Metrology
R. Rodriguez-Vera; F. Mendoza-Santoyo, Editor(s)

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