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Proceedings Paper

Enhancement of EUV emission from a liquid microjet target by use of dual laser pulses
Author(s): Takeshi Higashiguchi; Chirag Rajyaguru; Masato Koga; Keita Kawasaki; Wataru Sasaki; Shoichi Kubodera; Takashi Kikuchi; Noboru Yugami; Shigeo Kawata; Alexander A. Andreev
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Paper Abstract

Extreme ultraviolet (EUV) radiation at the wavelength of around 13nm waws observed from a laser-produced plasma using continuous water-jet. Strong dependence of the conversion efficiency (CE) on the laser focal spot size and jet diameter was observed. The EUV CE at a given laser spot size and jet diameter was further enhanced using double laser pulses, where a pre-pulse was used for initial heating of the plasma.

Paper Details

Date Published: 23 March 2005
PDF: 4 pages
Proc. SPIE 5777, XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, (23 March 2005); doi: 10.1117/12.611202
Show Author Affiliations
Takeshi Higashiguchi, Miyazaki Univ. (Japan)
Chirag Rajyaguru, Miyazaki Univ. (Japan)
Masato Koga, Miyazaki Univ. (Japan)
Keita Kawasaki, Miyazaki Univ. (Japan)
Wataru Sasaki, Miyazaki Univ. (Japan)
Nano-Tech Photon Inc. (Japan)
Shoichi Kubodera, Miyazaki Univ. (Japan)
Takashi Kikuchi, Utsunomiya Univ. (Japan)
Noboru Yugami, Utsunomiya Univ. (Japan)
Shigeo Kawata, Utsunomiya Univ. (Japan)
Alexander A. Andreev, Institute for Laser Physics (Russia)

Published in SPIE Proceedings Vol. 5777:
XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
Jarmila Kodymova, Editor(s)

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