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Proceedings Paper

Once upon a time: a hearty glance over the 30-year history of excimer lasers
Author(s): Maxime K. Makarov
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Paper Abstract

The genesis of excimer lasers is reviewed. Contrary to previous retrospectives, the present analysis is restricted only to physics and technics of discharge pumped Rare-Gas Halides (RGH) excimer lasers. Some side factors like politics or human personality, interfering the development of excimer technology, are also discussed.

Paper Details

Date Published: 23 March 2005
PDF: 6 pages
Proc. SPIE 5777, XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, (23 March 2005); doi: 10.1117/12.611113
Show Author Affiliations
Maxime K. Makarov, SOPRA S.A. (France)


Published in SPIE Proceedings Vol. 5777:
XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers

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