Share Email Print
cover

Proceedings Paper

Digital holographic interferometer for quasistatic and vibrating micro-objects analysis
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

A variety of microelements require enhanced tools for their testing at various stages of production and exploitation. It refers to their analysis at static, quasistatic and vibration modes. Especially active, vibrating elements introduce unprecedented requirements concerning their design and testing. In the paper we present methodology and system based on combined digital holographic interferometry (DHI) and time average digital holography (TADH) which enables quantitative analysis of static and slowly changing microelements as well as qualitative analysis of vibrating objects. In DHI due to usage of numerical phases calculated from a sequence of holograms, an arbitrary phase difference related to a chosen stage of varying object can be calculated. TADH provides information about the vibration mode shapes which is crucial for the further analysis of vibrating microelements. Exemplary quantitative results of PZT actuator and membrane out-of-plane deformation measurement and qualitative results of vibrating membrane testing are presented and discussed.

Paper Details

Date Published: 23 February 2005
PDF: 8 pages
Proc. SPIE 5775, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments III, (23 February 2005); doi: 10.1117/12.610683
Show Author Affiliations
Leszek Salbut, Warsaw Univ. of Technology (Poland)
Jerzy Krezel, Warsaw Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 5775:
Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments III
Ryszard S. Romaniuk, Editor(s)

© SPIE. Terms of Use
Back to Top