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Proceedings Paper

Two-dimensional photonic crystals: fabrication of the periodic arrays by visible light holographic technique
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Paper Abstract

Application of photonic crystals in the future photonic integrated circuits (PICs) is one of the most interesting issues in modern photonics. With the photonic-crystal-based PICs it will be possible, at last, to realize compact in size, multicomponent optical integrated circuits. Nanostructured materials with ordered arrays of holes or rods are practical realization of photonic band-gap concept. In this paper we present a fabrication method for periodic arrays with openings of arbitrary shape and size. The method is based on exposition of thin photoresist film with two interfering laser beams 3rd harmonics of Nd-YAG laser source and positive photoresist has been used. Two examples of periodic structures are described here: obtained with 75° and 90° substrate rotation. In both cases the starting structure was one-dimensional diffraction grating with period of 1.26 μm. Two different patterns has been obtained in photoresist as a result of the test exposures. In one case nearly circular openings with diameter of 780 nm has been obtained. Periodicity of the resulting array, grid pattern, shape and size of the openings can be varied by adjustment of exposure parameters which can lead to fabrication of two-dimensional photonic crystal.

Paper Details

Date Published: 23 February 2005
PDF: 5 pages
Proc. SPIE 5775, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments III, (23 February 2005); doi: 10.1117/12.610644
Show Author Affiliations
Rafal Dylewicz, Wroclaw Univ. of Technology (Poland)
Jaroslaw Mysliwiec, Wroclaw Univ. of Technology (Poland)
Sergiusz Patela, Wroclaw Univ. of Technology (Poland)
Andrzej Miniewicz, Wroclaw Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 5775:
Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments III
Ryszard S. Romaniuk, Editor(s)

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