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Proceedings Paper

Silicon nanocrystals in superlattices of yttrium-stabilized zirconia and silicon
Author(s): Arjun Guha; M. Alexe; R. Scholz
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Paper Abstract

Silicon nanocrystals embedded in silicon dioxide matrices have exhibited optical gain in the visible region when pumped by a laser source, but to be commercially viable in laser applications and integration into microelectronics, emission has to be electrically stimulated rather than optically pumped. Superlattices of silicon and different non-silicon oxides were fabricated by pulsed laser deposition and subsequent rapid thermal annealing in inert atmosphere to obtain nanocrystalline silicon embedded in crystalline oxide layers. High resolution transmission electron microscopy was used to detect presence of silicon nanocrystals embedded in a silicon dioxide matrix. Reported in this letter are silicon nanocrystals with size from 3 nm to 7 nm obtained in Si/YSZ superlattices.

Paper Details

Date Published: 22 August 2005
PDF: 4 pages
Proc. SPIE 5925, Nanophotonic Materials and Systems II, 59250L (22 August 2005); doi: 10.1117/12.609798
Show Author Affiliations
Arjun Guha, Purdue Univ. (United States)
M. Alexe, Max-Planck Institut fuer Mikrostukturphysik (Germany)
R. Scholz, Max-Planck Institut fuer Mikrostukturphysik (Germany)

Published in SPIE Proceedings Vol. 5925:
Nanophotonic Materials and Systems II
Zeno Gaburro; Stefano Cabrini, Editor(s)

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