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Proceedings Paper

3D deformation analysis of flow and gas sensors membranes for reliability assessment
Author(s): Neus Sabate; Juergen Keller; Astrid Gollhardt; Dietmar Vogel; Isabel Gracia; Carles Cane; Joan Ramon Morante; Bernd Michel
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Paper Abstract

Micromachined microsensors for gas or flow detection based on physical behaviour of a special layer of a membrane have to fulfil high quality and reliability requirements especially in safety or security applications. For the reliability assessment a combination of simulative and experimental methods is usually carried out for the fully understanding of the thermo-mechanical behaviour. Due to the micromachining involved in the production of the sensor components the thermo-mechanical response of the layers are strongly dependent on process parameters. Therefore experimental methods for the 3D deformation detection are essential. In this paper experimental methods such as profilometry and scanning probe microscopy are tested for the evaluation of residual stresses and thermomechanical induced stress/strain fields.

Paper Details

Date Published: 1 July 2005
PDF: 9 pages
Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); doi: 10.1117/12.608660
Show Author Affiliations
Neus Sabate, Univ. de Barcelona (Spain)
Fraunhofer Micro Materials Ctr. Berlin at IZM Berlin (Germany)
Juergen Keller, Fraunhofer Micro Materials Ctr. Berlin at IZM Berlin (Germany)
Astrid Gollhardt, Fraunhofer Micro Materials Ctr. Berlin at IZM Berlin (Germany)
Dietmar Vogel, Fraunhofer Micro Materials Ctr. Berlin at IZM Berlin (Germany)
Isabel Gracia, Ctr. Nacional de Microelectronica (Spain)
Carles Cane, Ctr. Nacional de Microelectronica (Spain)
Joan Ramon Morante, Univ. de Barcelona (Spain)
Bernd Michel, Fraunhofer Micro Materials Ctr. Berlin at IZM Berlin (Germany)


Published in SPIE Proceedings Vol. 5836:
Smart Sensors, Actuators, and MEMS II
Carles Cane; Jung-Chih Chiao; Fernando Vidal Verdu, Editor(s)

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