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Proceedings Paper

Integrable silicon microsystem for three-dimensional flow focusing
Author(s): Antonio Luque; Jose M. Quero; Alfonso M. Ganan-Calvo; Jaume Esteve; Silvia Gonsalve
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Paper Abstract

Hydrodynamic focusing of flows can be used for a variety of applications. This paper presents the design of a microdevice that performs 3D hydrodynamic flow focusing, with the advantage of being capable to be integrated into bidimensional arrays. The device is formed by two structures that conduct different fluids from different inlet ports to a common outlet. Near the outlet, a three-dimensional structure is built that performs the focusing of one fluid inside the other one. The device is built on silicon substrates. The paper describes the fabrication process in detail, and some preliminary tests made on a prototype are presented. Numerical simulations of the fluidic behavior are also discussed.

Paper Details

Date Published: 1 July 2005
PDF: 9 pages
Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); doi: 10.1117/12.608639
Show Author Affiliations
Antonio Luque, Univ. de Sevilla (Spain)
Jose M. Quero, Univ. de Sevilla (Spain)
Alfonso M. Ganan-Calvo, Univ. de Sevilla (Spain)
Jaume Esteve, Ctr. Nacional de Microelectronica (Spain)
Silvia Gonsalve, Univ. de Sevilla (Spain)


Published in SPIE Proceedings Vol. 5836:
Smart Sensors, Actuators, and MEMS II
Carles Cane; Jung-Chih Chiao; Fernando Vidal Verdu, Editor(s)

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