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Proceedings Paper

A current density distribution approach to the optimisation of RF-MEMS variable capacitors
Author(s): Suat Ayoz; Hatice M. Tuncer; Florin Udrea; Adrian Ionescu; Raphael Fritschi
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Paper Abstract

An argument for the geometry based frequency range extension of tunable MEMS capacitors is presented. It is shown that, besides reducing the length of the feed arms, the parasitic inductances in a parallel-plate MEMS capacitor can be reduced further by optimising the plate geometry. Extension of the self resonance frequency is demonstrated with reduced circumference of the plate, due to high-frequency currents travelling around the edge of the plate and acting as a major component affecting the self-resonance frequency (SRF) of the capacitor. Full-wave 2.5-D electromagnetic simulation results using Agilent EEsof's ADS Momentum are presented that demonstrate the improvement in self-resonance frequency of circular and symmetrically fed structures. It is shown that efforts in shortening current paths by means of slots did not yield significant further improvement.

Paper Details

Date Published: 1 July 2005
PDF: 8 pages
Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); doi: 10.1117/12.608587
Show Author Affiliations
Suat Ayoz, Univ. of Cambridge (United Kingdom)
Hatice M. Tuncer, Univ. of Cambridge (United Kingdom)
Florin Udrea, Univ. of Cambridge (United Kingdom)
Adrian Ionescu, Ecole Polytechnique Federale de Lausanne (Switzerland)
Raphael Fritschi, Ecole Polytechnique Federale de Lausanne (Switzerland)


Published in SPIE Proceedings Vol. 5836:
Smart Sensors, Actuators, and MEMS II
Carles Cane; Jung-Chih Chiao; Fernando Vidal Verdu, Editor(s)

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