Share Email Print
cover

Proceedings Paper

TiNi shape memory alloy based micropumps
Author(s): Y. Q. Fu; J. K. Luo; M. Hu; H. J. Du; A. J. Flewitt; W. I. Milne
Format Member Price Non-Member Price
PDF $17.00 $21.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Three types of micropumps based on TiNi shape memory alloy thin films were designed and fabricated. The TiNi films were prepared on silicon substrate by co-sputtering TiNi target and a separate Ti target at room temperature, and then post annealed at 650°C. The first pump design is based on a single TiNi/Si bimorph membrane structure with inlet and outlet. The second design is based on three layer structures bonded together, with one TiNi/Si active membrane structure and two layers of check valves. The third design is based on two TiNi/SU-8 composite structures, with TiNi as an actuation element, and SU-8/Si as a spring-back structure. The three types of micropump structures were fabricated based on the conventional MEMS processes.

Paper Details

Date Published: 1 July 2005
PDF: 8 pages
Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); doi: 10.1117/12.608506
Show Author Affiliations
Y. Q. Fu, Univ. of Cambridge (United Kingdom)
Singapore-Massachusetts Institute Technology Alliance (Singapore)
J. K. Luo, Univ. of Cambridge (United Kingdom)
M. Hu, Singapore-Massachusetts Institute Technology Alliance (Singapore)
H. J. Du, Singapore-Massachusetts Institute Technology Alliance (Singapore)
A. J. Flewitt, Univ. of Cambridge (United Kingdom)
W. I. Milne, Univ. of Cambridge (United Kingdom)


Published in SPIE Proceedings Vol. 5836:
Smart Sensors, Actuators, and MEMS II
Carles Cane; Jung-Chih Chiao; Fernando Vidal Verdu, Editor(s)

© SPIE. Terms of Use
Back to Top