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Proceedings Paper

TiNi shape memory alloy based micropumps
Author(s): Y. Q. Fu; J. K. Luo; M. Hu; H. J. Du; A. J. Flewitt; W. I. Milne
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Paper Abstract

Three types of micropumps based on TiNi shape memory alloy thin films were designed and fabricated. The TiNi films were prepared on silicon substrate by co-sputtering TiNi target and a separate Ti target at room temperature, and then post annealed at 650°C. The first pump design is based on a single TiNi/Si bimorph membrane structure with inlet and outlet. The second design is based on three layer structures bonded together, with one TiNi/Si active membrane structure and two layers of check valves. The third design is based on two TiNi/SU-8 composite structures, with TiNi as an actuation element, and SU-8/Si as a spring-back structure. The three types of micropump structures were fabricated based on the conventional MEMS processes.

Paper Details

Date Published: 1 July 2005
PDF: 8 pages
Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); doi: 10.1117/12.608506
Show Author Affiliations
Y. Q. Fu, Univ. of Cambridge (United Kingdom)
Singapore-Massachusetts Institute Technology Alliance (Singapore)
J. K. Luo, Univ. of Cambridge (United Kingdom)
M. Hu, Singapore-Massachusetts Institute Technology Alliance (Singapore)
H. J. Du, Singapore-Massachusetts Institute Technology Alliance (Singapore)
A. J. Flewitt, Univ. of Cambridge (United Kingdom)
W. I. Milne, Univ. of Cambridge (United Kingdom)


Published in SPIE Proceedings Vol. 5836:
Smart Sensors, Actuators, and MEMS II
Carles Cane; Jung-Chih Chiao; Fernando Vidal Verdu, Editor(s)

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