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Proceedings Paper

MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing
Author(s): Maria Villarroya; Jaume Verd; Jordi Teva; Gabriel Abadal; Eduard Figueras; Francesc Perez-Murano; Jaume Esteve; Nuria Barniol
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Paper Abstract

A Micro Electro Mechanical System (MEMS) for mass detection is presented. It has been developed by the monolithic integration of the mechanical transducer with the CMOS control circuit. The sensor transducer consists on an array of four resonating cantilevers; oscillation is achieved by electrostatic excitation. The independent control on each cantilever of the arrays allows multiple sensing on a single device. The microresonators are fabricated on polysilicon in a compatibilized process with the front-end CMOS circuitry. The readout of the cantilevers oscillation is achieved by a current amplifier. Expected Mass resolution in air is 80 ag/Hz.

Paper Details

Date Published: 1 July 2005
PDF: 8 pages
Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); doi: 10.1117/12.608354
Show Author Affiliations
Maria Villarroya, Univ. Autonoma de Barcelona (Spain)
Jaume Verd, Univ. Autonoma de Barcelona (Spain)
Jordi Teva, Univ. Autonoma de Barcelona (Spain)
Gabriel Abadal, Univ. Autonoma de Barcelona (Spain)
Eduard Figueras, Institut de Microelectronica de Barcelona (Spain)
Francesc Perez-Murano, Institut de Microelectronica de Barcelona (Spain)
Jaume Esteve, Institut de Microelectronica de Barcelona (Spain)
Nuria Barniol, Univ. Autonoma de Barcelona (Spain)


Published in SPIE Proceedings Vol. 5836:
Smart Sensors, Actuators, and MEMS II
Carles Cane; Jung-Chih Chiao; Fernando Vidal Verdu, Editor(s)

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