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Proceedings Paper

Microhotplate-based silicon gas sensor arrays with linear temperature gradient for wine quality monitoring
Author(s): Andrea Adami; Leandro Lorenzelli; Vittorio Guarnieri; Mario Zen; Luca Francioso; Pietro Siciliano; A. Forleo; A. M. Taurino; Giuseppe Agnusdei
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Paper Abstract

In this work, we describe the design implementation, validated by experimental results, of an innovative gas sensor array for wine quality monitoring. The main innovation of this integrated array deals with the simultaneous outputs, from a single chip on TO-12 socket, of 8 different signals coming from a WO3 thin film structure heated in a linear temperature gradient mode, allowing an overall evaluation of gas sensing properties of the material in a 100°C-wide window, typically from 300 to 400°C. The implemented sensitive layer is a WO3 film deposed by RF-sputtering. Preliminary tests of gas sensing showed good responses to the target analytes for the specific application (1-heptanol, 3-methyl butanol, benzaldehyde and ethyl-hexanoate).

Paper Details

Date Published: 1 July 2005
PDF: 10 pages
Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); doi: 10.1117/12.608246
Show Author Affiliations
Andrea Adami, ITC-irst (Italy)
Leandro Lorenzelli, ITC-irst (Italy)
Vittorio Guarnieri, ITC-irst (Italy)
Mario Zen, ITC-irst (Italy)
Luca Francioso, National Council of Research (Italy)
Pietro Siciliano, National Council of Research (Italy)
A. Forleo, National Council of Research (Italy)
A. M. Taurino, National Council of Research (Italy)
Giuseppe Agnusdei, Optel (Italy)

Published in SPIE Proceedings Vol. 5836:
Smart Sensors, Actuators, and MEMS II
Carles Cane; Jung-Chih Chiao; Fernando Vidal Verdu, Editor(s)

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