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Proceedings Paper

Design and development of 3-bit polymer MEMS phase shifters
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Paper Abstract

This paper presents the design and development of 3-bit polymer MEMS phase shifters for wireless communication applications. Polymer membrane and ferroelectric (barium strontium titanate) thin film on silicon substrates are employed for device fabrication. BI-CPW design and fabrication processes of ferroelectric and polymer materials compatible with current silicon technology are investigated. Mechanical operation with low DC bias voltage and scattering parameters of a polymer MEMS switch and phase delay lines are measured. The small size and low pull down voltage demonstrated in this research are promising characteristics for commercial applications of 3-bit polymer MEMS phase shifters with low cost.

Paper Details

Date Published: 16 May 2005
PDF: 8 pages
Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); doi: 10.1117/12.608127
Show Author Affiliations
Hargsoon Yoon, Univ. of Arkansas (United States)
Taeksoo Ji, Univ. of Arkansas (United States)
Vijay K. Varadan, Univ. of Arkansas (United States)


Published in SPIE Proceedings Vol. 5763:
Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan, Editor(s)

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