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Proceedings Paper

3-D polymeric microfluidic devices for BioMOEMS applications
Author(s): F. J. Blanco; J. Berganzo; J. Garcia; K. Mayora; A. Calle; L. M. Lechuga
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Paper Abstract

This paper describes the fabrication, packaging and characterization of novel multilayer polymer microfluidic systems fabricated by a CMOS compatible process. These microfluidic devices were specially designed for BioMOEMS applications. Embedded multilayer rectangular smooth and uniform microchannels, 50 to 150 mm wide and 18mm deep were studied. Steady-state flow rates and pressure driven flow control were measured in the laminar flow regime. Flow rates ranging from 1 to 100 μl/min, at pressure drop ranging from 10 to 600 kPa, were obtained. These flow rates yield Reynolds numbers (Re) up to 20. Results indicate that the experimental Re and the flow friction coefficient (f) are in good agreement with the laminar flow theory. These experimental results facilitate the future designs of different microfluidic devices designed by using classical fluidic theory. We also present two different methods developed for macro/microfluidic packaging in order to connect these microfluidic devices to the macroscopic world. The microsystem packaging can withstand pressure drops up from 500 to 2000 kPa with any liquid leakage.

Paper Details

Date Published: 29 June 2005
PDF: 11 pages
Proc. SPIE 5839, Bioengineered and Bioinspired Systems II, (29 June 2005); doi: 10.1117/12.608101
Show Author Affiliations
F. J. Blanco, Ikerlan S. Coop (Spain)
J. Berganzo, Ikerlan S. Coop (Spain)
J. Garcia, Ikerlan S. Coop (Spain)
K. Mayora, Ikerlan S. Coop (Spain)
A. Calle, Microelectronics National Ctr., CSIC (Spain)
L. M. Lechuga, Microelectronics National Ctr., CSIC (Spain)

Published in SPIE Proceedings Vol. 5839:
Bioengineered and Bioinspired Systems II
Ricardo A. Carmona; Gustavo Linan-Cembrano, Editor(s)

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