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Proceedings Paper

Liquid nitrogen flowrate alarm system for MBE
Author(s): Yongwei Sun; Shuying Li; Haiqiao Ni; Yun Xu; Lianghui Chen
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Paper Abstract

Liquid nitrogen is very important for MBE system. Most MBE systems use the liquid nitrogen to absorb the impurity molecules. If MBE cryoshroud is lack of liquid nitrogen, the pressure of the growth chamber will grow. This will affect the film quality. But too much liquid nitrogen is a waste. We have developed a liquid nitrogen flowrate alarm system to monitor the liquid nitrogen status in MBE cryoshroud. In this method, a temperature sensor is placed at the end of the cryoshroud. The temperature varies with changing of the liquid nitrogen status in cryoshroud. If the liquid nitrogen level in the cryoshroud is too low or too high, the LNFA will send out an alarm to warn the user to adjust the liquid nitrogen flowrate. In our experiments, we found this method works well, and the temperature responds sensitively. With the help of this system, people can view the liquid nitrogen status of the entire growth process. Compare with other method, it is very cheap.

Paper Details

Date Published: 8 December 2004
PDF: 3 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.608046
Show Author Affiliations
Yongwei Sun, Semiconductor Institute, CAS (China)
Shuying Li, Semiconductor Institute, CAS (China)
Haiqiao Ni, Semiconductor Institute, CAS (China)
Yun Xu, Semiconductor Institute, CAS (China)
Lianghui Chen, Semiconductor Institute, CAS (China)

Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)

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