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Proceedings Paper

Characterization of ZnO films grown on different substrates by L-MBE method
Author(s): Xiaodong Yang; Jingwen Zhang; Qing'an Xu; Yongning He; Hongbo Wang; Weifeng Zhang; Xun Hou
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Paper Abstract

ZnO films were fabricated using Laser molecular beam epitaxy method on different substrates including Si(001), C-plane and R-plane Al2O3. The crystallinity and orientation of the films, as well as the epitaxial relationship between ZnO films and the substrate were studied using X-ray diffraction (XRD) technique. For the films grown on C-plane Al2O3 and Si(001) substrates, Highly c-axis oriented ZnO films were obtained. The surface morphology and roughness of ZnO films were determined by atomic force microscopy (AFM) and Reflection High Energy Electron diffraction (RHEED).

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.608013
Show Author Affiliations
Xiaodong Yang, Xi'an Jiaotong Univ. (China)
Xi'an Institute of Optics and Precision Mechanics, CAS (China)
Graduate School of the Chinese Academy of Sciences (China)
Jingwen Zhang, Xi'an Jiaotong Univ. (China)
Xi'an Institute of Optics and Precision Mechanics, CAS (China)
Qing'an Xu, Xi'an Jiaotong Univ. (China)
Xi'an Institute of Optics and Precision Mechanics, CAS (China)
Graduate School of the Chinese Academy of Sciences (China)
Yongning He, Xi'an Jiaotong Univ. (China)
Hongbo Wang, Xi'an Jiaotong Univ. (China)
Weifeng Zhang, Henan Univ. (China)
Xun Hou, Xi'an Jiaotong Univ. (China)
Xi'an Institute of Optics and Precision Mechanics, CAS (China)
Graduate School of the Chinese Academy of Sciences (China)


Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)

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