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Proceedings Paper

The effects of ion cleaning on the roughness of substrates and laser induced damage thresholds of films
Author(s): Dawei Zhang; Jianda Shao; Shuhai Fan; Yuanan Zhao; Ruiying Fan; Yingjian Wang; Zhengxiu Fan
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Paper Abstract

The ion cleaning effect on the roughness of substrates and laser induced damage thresholds (LIDT) of films were investigated. It is found that ion cleaning has different effects on the roughness of substrates with the different ion cleaning time, and it improves the LIDT of single layer films greatly.

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.608005
Show Author Affiliations
Dawei Zhang, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Shuhai Fan, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Yuanan Zhao, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Ruiying Fan, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Yingjian Wang, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics, CAS (China)


Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)

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