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Proceedings Paper

Gas microsensing system with a FGMOS on a MEM structure
Author(s): Jose Luis Gonzalez-Vidal; Alfredo Reyes-Barranca; M. de la L. Olvera; Arturo Maldonado; Wilfrido Calleja-Arriaga
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Paper Abstract

In this work a thin film gas microsensor based on both a double polysilicon micro-hotplate (MHP) and a polysilicon floating gate MIS transistor (FG-MIS) is described. Sensing section is a squared polysilicon plate which contains a doped Zinc Oxide (ZnO) thin film. The sensing section is heated by an U-shaped polysilicon stripe which is electrically isolated from the top and the bottom using oxide films. The micro-hotplate is both mechanically supported and thermally isolated using a deep cavity micromachined in the silicon substrate. The sensing film is electrically connected to the floating-gate transistor where the conductivity channel is modulated by the charged generated at the sensing film. The sensor structure was characterized for detecting carbon monoxide (CO) at 300 °C. The hot area is thermally isolated using an arrangement of cavities micromachined in the silicon substrate. Finally a complete layout of the sensor system is presented in this paper.

Paper Details

Date Published: 1 July 2005
PDF: 8 pages
Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); doi: 10.1117/12.607946
Show Author Affiliations
Jose Luis Gonzalez-Vidal, Universidad Autonoma del Estado de Hidalgo (Mexico)
Alfredo Reyes-Barranca, CINVESTAV-IPN (Mexico)
M. de la L. Olvera, CINVESTAV-IPN (Mexico)
Arturo Maldonado, CINVESTAV-IPN (Mexico)
Wilfrido Calleja-Arriaga, I.N.A.O.E. (Mexico)


Published in SPIE Proceedings Vol. 5836:
Smart Sensors, Actuators, and MEMS II
Carles Cane; Jung-Chih Chiao; Fernando Vidal Verdu, Editor(s)

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