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Proceedings Paper

Optical microlenses for MOEMS
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Paper Abstract

A new concept of the fabrication process for glass microlenses (external diameter ED<1 mm, focal length a few millimeters), based on the silicon master mask-less anisotropic wet etching in KOH, vacuum anodic bonding and re-flow of borosilicate glass, followed by the precise wafer-scale polishing and DRIE has been presented. A single spherical microlens as well as an array of spherical microlenses with focal length between 44.8 and 8.6 mm and external diameter 0.35 to 0.985 mm have been repeatable manufactured.

Paper Details

Date Published: 1 July 2005
PDF: 10 pages
Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); doi: 10.1117/12.607912
Show Author Affiliations
Roberto Carasco, Univ. Miguel Hernandez de Elche (Spain)
Jan A. Dziuban, FEMTO-ST (France)
Ignacio Moreno, Univ. Miguel Hernandez de Elche (Spain)
Christophe Gorecki, FEMTO-ST (France)
Lukasz Nieradko, FEMTO-ST (France)
Rafal Walczak, Wroclaw Univ. of Technology (Poland)
Malgorzata Kopytko, Wroclaw Univ. of Technology (Poland)
Michal Jozwik, FEMTO-ST (France)


Published in SPIE Proceedings Vol. 5836:
Smart Sensors, Actuators, and MEMS II
Carles Cane; Jung-Chih Chiao; Fernando Vidal Verdu, Editor(s)

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